Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film

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タイトル Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film
キーワード
著者/共著者名 Yushi Iijima, Toru Harigai, Ryo Isono, Takahiro Imai, Yoshiyuki Suda, Hirofumi Takikawa, Masao Kamiya, Makoto Taki, Yushi Hasegawa, Nobuhiro Tsuji, Satoru Kaneko, Shinsuke Kunitsugu, Hitoe Habuchi, Shuji Kiyohara, Mikio Ito, Sam Yick, Avi Bendavid and Phil Martin
誌名・書名 Japanese Journal of Applied Physics
出版社 IOP
出版年月 2018年
巻−号 Vol.57 No.1S
ページ 01AE07-1 - 01AE07-5
言語 英語
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備考