Electrical Properties of (110)-Oriented Nondoped Mg2Si Films with p-Type Conduction Prepared by RF Magnetron Sputtering Method

登録コード 705
タイトル Electrical Properties of (110)-Oriented Nondoped Mg2Si Films with p-Type Conduction Prepared by RF Magnetron Sputtering Method
キーワード Mg2Si, (110)-oriented films, electrical properties, Seebeck effect, radiofrequency (RF) magnetron sputtering, postannealing effect
著者/共著者名 SHOTA OGAWA, ATSUO KATAGIRI, TAKAO SHIMIZU, MASAAKI MATSUSHIMA, KENSUKE AKIYAMA, YOSHISATO KIMURA, HIROSHI UCHIDA and HIROSHI FUNAKUBO
誌名・書名 Journal of ELECTRONIC MATERIALS
出版社 Springer US
出版年月 2014年 6月
巻−号 Vol. 43, No. 6
ページ 2269 - 2273
言語
DOI http://dx.doi.org/10.1007/s11664-014-3040-6
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